MicroVOC-CAM Airborne Molecular Organic Contamination Monitoring
The MicroVOC-CAM is based on gas chromatography with a flame ionisation detector (GC-FID) to provide online monitoring of organic contamination in the cleanroom environment. It is primarily used to detect and quantify volatile organic compounds (VOC) at sub-ppb levels. The MicroVOC-CAM can support up to 16 sampling points with the detection of up to 30 different compounds at each point.
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