Orion 3100 Airborne Molecular Inorganic Contamination Monitoring
The Orion 3100 is based on Cavity Ring Down Spectroscopy (CRDS) to provide online monitoring of inorganic contamination in the cleanroom environment. It is primarily used to detect and quantify compounds such as ammonia, amines, NMP, HCl, HF and SO2 at sub-ppb levels. The Orion 3100 can support up to 16, 30 or 60 sampling points. Unlike other techniques, it does not require a radioactive source for operation. Therefore, it is better in terms of operator safety and more convenient as it does not require any consumables that require special disposal procedures.
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